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공진 기반 마이크로기계 생화학 센싱 구조물의 해석
논문 개요
| 기관명 | NDSL |
|---|---|
| 저널명 | 대한기계학회 2008년도 추계학술대회A |
| ISSN | , |
| ISBN |
논문저자 및 소속기관 정보
| 저자(한글) | 여민구,신윤혁,임홍재,임시형 |
|---|---|
| 저자(영문) | |
| 소속기관 | |
| 소속기관(영문) | |
| 출판인 | |
| 간행물 번호 | |
| 발행연도 | 2008-01-01 |
| 초록 | A microcantilever is a well-known MEMS structure for sensing bio-chemical molecules. When bio-chemical molecules are adsorbed on the microcantilever's surface, resonance frequency shift is generated. There are two issues in this phenomena. The first one is which one between mass change and surface stress change effects is more dominant on the resonance frequency shift. The second one is what will be the performance change when the boundary condition is changed from cantilevers to double clamped beams. We have studied the effect of surface stress change and compared it with that of mass change by using FEM analysis. Furthermore, for microstructures having different boundary conditions, we have studied Q-factor, which determines the detection limit of micro/nano mechanical sensors. |
| 원문URL | http://click.ndsl.kr/servlet/OpenAPIDetailView?keyValue=03553784&target=NPAP&cn=NPAP08168875 |
| 첨부파일 |
추가정보
| 과학기술표준분류 | |
|---|---|
| ICT 기술분류 | |
| DDC 분류 | |
| 주제어 (키워드) | 바이오-케미컬 센서,멤스,초소형-외팔보,공진,표면 응력,Bio-Chemical Sensor,MEMS,Micro-Cantilever,Resonance,Surface Stress |