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논문 개요
| 기관명 | NDSL |
|---|---|
| 저널명 | 한국기계가공학회지 = Journal of the Korean Society of Manufacturing Technology |
| ISSN | 1598-6721,2288-0771 |
| ISBN |
논문저자 및 소속기관 정보
| 저자(한글) | 당현우,양성욱,도양회,최경현 |
|---|---|
| 저자(영문) | |
| 소속기관 | |
| 소속기관(영문) | |
| 출판인 | |
| 간행물 번호 | |
| 발행연도 | 2016-01-01 |
| 초록 | In this study, experiments are conducted to improve spray coating uniformity by using second and third electrodes based on the electrospray atomization mechanism. The uniformity of fabricated thin films can be improved by adjusting the design of the second electrode. The implementation of the second electrode with an elongated hole and a bending angle of $90^{ circ}$ results in highly uniform films. In addition, induced area to substrate is increased by lowering the applied voltage using the third electrode with a round rod shape. A linear correlation between applied voltage and induced area is confirmed. Thin film thickness and surface roughness are measured after the fabrication of thin films through the electrospray process. It is confirmed that a thin film is formed having an average thickness of 273.44 nm, a thickness uniformity of less than 10%, and a surface roughness of 3 nm. |
| 원문URL | http://click.ndsl.kr/servlet/OpenAPIDetailView?keyValue=03553784&target=NART&cn=JAKO201615952962931 |
| 첨부파일 |
추가정보
| 과학기술표준분류 | |
|---|---|
| ICT 기술분류 | |
| DDC 분류 | |
| 주제어 (키워드) | 정전분무,멀티 노즐,박막 코팅,미립화,코팅 균일도,Electrospray Deposition,Multi Nozzle,Thin Film Coating,Atomization,Coating Uniformity |