| 초록 |
[ $Sr_xBa_{1-x}Nb_2O_6$ ] (SBN, $0.25{ leq}x{ leq}0.75$ ) ceramic is a ferroelectric material with tetragonal tungsten bronze (TTB) type structure, which has a high pyroelectric coefficient, piezoelectric, and a photo refractive properties. In this study, SBN60(x=0.6) thin film was manufactured by ion beam sputtering technique. Using the prepared SBN60 target in $Ar/O_2$ atmosphere as-deposited SBN60 thin film on Pt(100)/ $TiO_2/SiO_2/Si$ substrate crystallization and orientation behavior as well as electric properties of SBN60 thin film were examined. SBN60 deposition up to $3000{ AA}$ in thickness, SBN60 thin film was heat-treated at $650^{ circ}C{ sim}800^{ circ}C$ . The orientation was shown primarily along (001) plane from XRD pattern where working pressure was $4.3{ times}10^{-4}$ torr. The deposited layer was uniform, preferred orientatin and crystallization behavior resulted in the change of $O_2$ ratio was observed. In electric propertie of Pt/SBN60/Pt thin film capacitor remnant polarization (2Pr) value was $10{ mu}C/cm^2$ , the coercive filed (Ec) 50 kV/cm, and the dielectric constant 615, respectively. |
