- HOME
- 홈페이지 이용안내
논문 기본정보
원자층 증착법에 의한 Al2O3 박막 형성에 따른 모스아이 구조 반사방지 필름의 기계적 물성에 미치는 영향
논문 개요
| 기관명 | NDSL |
|---|---|
| 저널명 | 한국표면공학회지 = Journal of the Korean institute of surface engineering |
| ISSN | 1225-8024, |
| ISBN |
논문저자 및 소속기관 정보
| 저자(한글) | 윤은영,이우재,장경수,최현진,최우창,권세훈 |
|---|---|
| 저자(영문) | |
| 소속기관 | |
| 소속기관(영문) | |
| 출판인 | |
| 간행물 번호 | |
| 발행연도 | 2015-01-01 |
| 초록 | $Al_2O_3$ thin films were deposited on the moth eye anti-reflective nanostructured polycarbonate films by atomic layer deposition (ALD) techniques. Without ALD- $Al_2O_3$ thin films, moth eye anti-reflective nanostructured films had a high optical transmittance of 95.47% at a wavelength of 550 nm and a very poor hardness of 0.1381 GPa. With increasing the thickness of $Al_2O_3$ thin films from 5 to 25 nm, the transmittance of moth eye anti-reflective nanostructured films was gradually decreased from 94.94 to 93.12%. On the other hand, the hardness of the films was greatly increased from 0.3498 to 0.7806 GPa with increasing the thickness of $Al_2O_3$ thin films. This result shows that ALD thin films can be applied to improve mechanical properties with an adequate optical transmittance of the conventional moth eye anti-reflection nanostructure films. |
| 원문URL | http://click.ndsl.kr/servlet/OpenAPIDetailView?keyValue=03553784&target=NART&cn=JAKO201514751394177 |
| 첨부파일 |
추가정보
| 과학기술표준분류 | |
|---|---|
| ICT 기술분류 | |
| DDC 분류 | |
| 주제어 (키워드) | Moth eye structure,Atomic layer deposition, lt,TEX gt,$Al_2O_3$ lt,/TEX gt,thin films,Mechanical properties |