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논문 기본정보
반도체 제조공정에서 품질과 생산성을 고려한 자동 계측 샘플링 방법
논문 개요
| 기관명 | NDSL |
|---|---|
| 저널명 | 전기학회논문지= The Transactions of the Korean Institute of Electrical Engineers |
| ISSN | 1975-8359, |
| ISBN |
논문저자 및 소속기관 정보
| 저자(한글) | 신명구,이지형 |
|---|---|
| 저자(영문) | |
| 소속기관 | |
| 소속기관(영문) | |
| 출판인 | |
| 간행물 번호 | |
| 발행연도 | 2012-01-01 |
| 초록 | This paper proposes an automatic measurement sampling method for the semiconductor manufacturing process. The method recommends sampling rates using information of process capability indexes and production scheduling plan within the restricted metrology capacity. In addition, it automatically controls the measurement WIP (Work In Process) using measurement priority values to minimize the measurement risks and optimize the measurement capacity. The proposed sampling method minimizes measurement controls in the semiconductor manufacturing process and improves the fabrication productivity via reducing measurement TAT (Turn Around Time), while guaranteeing the level of process quality. |
| 원문URL | http://click.ndsl.kr/servlet/OpenAPIDetailView?keyValue=03553784&target=NART&cn=JAKO201225067516719 |
| 첨부파일 |
추가정보
| 과학기술표준분류 | |
|---|---|
| ICT 기술분류 | |
| DDC 분류 | |
| 주제어 (키워드) | Auto metrology,Sampling,Quality,Productivity,Metrology capacity |