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논문 기본정보
Effect of a Cu Buffer Layer on the Structural, Optical, and Electrical Properties of IGZO/Cu bi-layered Films
논문 개요
| 기관명 | NDSL |
|---|---|
| 저널명 | Transactions on electrical and electronic materials |
| ISSN | 1229-7607, |
| ISBN |
논문저자 및 소속기관 정보
| 저자(한글) | Moon, Hyun-Joo,Gong, Tae-Kyung,Kim, Daeil,Choi, Dong-Hyuk,Son, Dong-Il |
|---|---|
| 저자(영문) | |
| 소속기관 | |
| 소속기관(영문) | |
| 출판인 | |
| 간행물 번호 | |
| 발행연도 | 2016-01-01 |
| 초록 | Transparent and conducting IGZO thin films were deposited by RF magnetron sputtering on thin Cu coated glass substrates to investigate the effect of a Cu buffer layer on the structural, optical, and electrical film properties. Although X-ray diffraction (XRD) analysis revealed that both the IGZO single layer and IGZO/Cu bi-layered films were in the amorphous phase, the IGZO/Cu films showed a lower resistivity of 5.7 #xD7;10 #x2212;4 #x3A9;cm due to the increased mobility and high carrier concentration. The decreased optical transmittance of the IGZO/Cu films was also attributed to a one order of magnitude higher carrier concentration than the IGZO films. From the observed results, the thin Cu layer is postulated to be an effective buffer film that can enhance the opto-electrical performance of the IGZO films in transparent thin film transistors. |
| 원문URL | http://click.ndsl.kr/servlet/OpenAPIDetailView?keyValue=03553784&target=NART&cn=JAKO201611366373260 |
| 첨부파일 |
추가정보
| 과학기술표준분류 | |
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| ICT 기술분류 | |
| DDC 분류 | |
| 주제어 (키워드) | IGZO,Cu,Magnetron sputtering,XRD,AFM,Figure of merit |