진공증착기(열증착기)
기관명 | ZEUS |
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장비번호 | |
제작사 | 대동하이텍 |
모델명 | 모델명 없음 |
장비사양 | |
취득일자 | 2012-07-30 |
취득금액 |
보유기관명 | 성균관대학교 |
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보유기관코드 | |
활용범위 | |
활용상태 | |
표준코드 | C503 |
표준분류명 | |
시설장비 설명 | - Compact type - Fast Deposition process - Easy Sample Loading Type - Easy Source refill type - Fast Vacuum pumping - Continue deposition process available type for Al process by special boat . Up to 10㎛ deposition per one boat1. VACUUM PROCESS CHAMBER 1 SET 1-1. MAIN CHAMBER . MATERIAL : SUS 304 . SIZE : I.D 310(W) x 310(D) x 310(H) REDUCING ADAPTOR FLANGE : 1 EA FRONT SIDE FULL OPEN DOOR . I.D 6" FLANGE FOR TURBO PUMP MOUNT PORT : 1 EA . I.D 4" FLANGE FOR VIEW WINDOW PORT & SHIELD ASSEMBLY : 1 SET . INCLUDE MIRROR TYPE WINDOW . CF 2.75" FLANGE FOR GAUGE & THICKNESS SENSOR & ETC : 6 EA . 1" HOLE FOR THERMAL ELECTRODE MOUNT PORT : 6 EA . CHAMBER INSIDE SHIED COVER : 1 SET . CHAMBER ALL ELECTRICAL POLISHING 1-2. LOADING CHAMBER . MATERIAL : SUS 304 . TOP FLANGE FOR SUBSTRATE HEATER & ROTATOR MOUNT PORT : 1 SET TOP SIDE DOOR OPEN/CLOSE TYPE (BY GAS SPRING) . GATE PORT ADAPTOR FLANGE : 1 SET 2. VACUUM PUMPING UNIT 1 SET ① TURBO PUMP & CONTROLLER : 1 SET . PUMPING SPEED : 400 L/Sec(N2) . I.D 6" MOUNT FLANGE . EDWARD or ALCATEL BRAND ② ROTARY VACUUM PUMP : 1 EA (KOREA BRAND) . PUMPING SPEED : 600 L/Min ③ I.D 10" GATE VALVE (PNEUMATIC) : 1 EA FOR LOADLOCK GATE ④ I.D 6" GATE VALVE (PNEUMATIC) : 1 EA FOR FRONT TURBO PUMP ⑤ NW25 ANGLE VALVE (PNEUMATIC) : 3 EA ⑥ CHAMBER VENT VALVE : 2 EA FOR MAIN CHAMBER & LOADLOCK CHAMBER VENTING ⑦ NW25 FLEXIBLE METAL HOSE (1M) : 3 EA ⑧ SOLENOID VALVE FOR ROTARY LINE VENT : 1 EA ⑨ ETC ADAPTOR : 1 SET ⑩ VACUUM DIAGRAM SCHEMATIC CONTROL PANEL WITH SAFETY ALARM (SEMI-AUTO) . PUMP ON/OFF SWITCH & UTILITY SAFETY INTERLOCK . AUTO VACUUM PUMPING & AUTO CHAMBER VENTING FUNCTION (BY PLC H/W & S/W) . OPERATING BY 10.8" COLOR TOUCH PANEL 3. SAMPLE ROTATION UNIT 1 SET ① SUBSTRATE ROTATION ASSEMBLY : 1 SET . ROTARY MOTION FEEDTHROUGH : 1 EA FOR SUBSTRATE ROTATION . ROTATION GEAR & BEARING HOUSING 일체 . ROTATION SHAFT & SHAFT SUPPORTER & ROTATION BAR . SUBSTRATE HOUSING & HOLDER : 1 SET . MATERIAL : SUS . SIZE : O.D 165∮ . 25mm x 25mm SAMPLE 13 SHEETS MOUNTABLE HOLDER : 1 SET . SAMPLE BACK SIDE LOADING TYPE . SHADOW MASK (SUS 0.3T) : 1 SET (CUSTOMER DEFINE) . MAIN SUBSTRATE HOLDER SUPPORT P10-6 torr 이하의 고진공에서 gold를 박막으로 증착시에 사용 solid-state dye-sensitized solar cell에서 상대전극으로 골드를 택할경우 사용하여 증착한다. |
장비이미지코드 | http://nfec.ntis.go.kr/storage/images/equip/photo/201305/.thumb/20130507165316824.jpg |
장비위치주소 | 경기 수원시 장안구 천천동 성균관대학교자연과학캠퍼스 300번지 성균관대학교 자연과학캠퍼스 제2공학관 4층 26405B |
NFEC 등록번호 | NFEC-2013-05-178724 |
예약방법 | |
카타로그 URL | |
메뉴얼 URL | |
원문 URL | http://www.zeus.go.kr/equip/read?equipId=Z-NTIS-0037203 |
첨부파일 |
과학기술표준분류 | |
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ICT 기술분류 | |
주제어 (키워드) |