장비 | 기업공감원스톱서비스

장비

고분해능전계방사주사전자현미경

보유기관명, 보유기관코드, 활용범위, 활용상태, 표준코드, 표준분류명, 시설장비 설명, 장비이미지코드, 장비위치주소, NFEC 등록번호, 예약방법, 카타로그 URL, 메뉴얼 URL, 원문 URL, 첨부파일 순으로 구성된 표입니다.
보유기관명	대구경북과학기술원
보유기관코드
활용범위
활용상태
표준코드	A206
표준분류명	시험
시설장비 설명	1. High resolution field emission scanning electron microscope with cold or thermal cathode which should permit 1.3nm or better guaranteed resolution at 1kV and 1.0nm or better 2. This FE-SEM should be standard-equipped with the function for mixing the detection signals of the upper and lower secondary electron (SE BSE signal) detectors and for getting backscattered electron at the low accelerating voltage region which could require both surface detail and compositional information. 3. This FE-SEM should be provided effective database and convenient operation system for SEM/EDX combination system included the hardware/software by using a signal (or two) set of mouse and keyboard to cover both SEM and EDX PC. 4. This system can be possible for user to control lens mode at SEM so that high resolution condition & EDX analysis condition etc. could exchange without switching aperture openings. 5. To effective maintaining high clean vacuum system it is equipped magnetic floating type Turbo Molecular Pump and anti-
장비이미지코드	https://www.zeus.go.kr/storage/images//equip/photo/201211/20121115094746.jpg
장비위치주소	대구경북과학기술원 중앙기기센터 205 소자클린룸
NFEC 등록번호	NFEC-2013-02-176204
예약방법
카타로그 URL
메뉴얼 URL
원문 URL	https://www.zeus.go.kr/resv/equip/read/Z-201812171064
첨부파일