장비 | 기업공감원스톱서비스

장비

첨단플라즈마클리너

보유기관명, 보유기관코드, 활용범위, 활용상태, 표준코드, 표준분류명, 시설장비 설명, 장비이미지코드, 장비위치주소, NFEC 등록번호, 예약방법, 카타로그 URL, 메뉴얼 URL, 원문 URL, 첨부파일 순으로 구성된 표입니다.
보유기관명	대구경북과학기술원
보유기관코드
활용범위
활용상태
표준코드	C502
표준분류명	시험
시설장비 설명	1. The plasma system is a low power hydrogen and oxygen-radical generator producing glow-discharge plasma within the generator housing. The hydrogen and oxygen-radicals disperse from the generator by convection passing over and around the specimen/ specimen holder tip to clean hydrocarbons from the surface. 2. The plasma system incorporates a multi-stage diaphragm pump backing a turbo molecular drag pump to assure fast reliable pumping or equivalent. The pump package enables Pump and Vent cycles of less than minutes coupled with cleaning times of 1-2 minutes or faster. Generating full cycle cleaning in less than four minutes or faster. 3. The H2/O2 recipe prevents/lessens buildup of contamination after about 1 minute of cleaning and even the worst burned-on contamination takes< 10 minutes or faster. Holey carbon films have been cleaned in this recipe for more than 9 minutes or more without damage. Alternate Ar/O2(Ar 75% - O2 25%) recipes can also be selected. 4. The hardware offers faster cycle times and a mu
장비이미지코드	http://www.zeus.go.kr/storage/images//equip/photo/201211/20121115113440.jpg
장비위치주소	대구경북과학기술원 중앙기기센터 205 소자클린룸
NFEC 등록번호	NFEC-2013-02-176141
예약방법
카타로그 URL
메뉴얼 URL
원문 URL	http://www.zeus.go.kr/resv/equip/read/Z-201812171128
첨부파일