| 시설장비 설명 |
SPM is a system that detects various physical quantities, such as interatomic forces, hardness, electricity and magnetic forces based on a resonated microscopic probe (a needle-like probe). It enables observation and mapping of the shape and physical property of a sample surface at nano-level. When it comes to observing shapes and physical properties at nanometer order or less, SPM is in the spotlight as an alternative to a scanning electron microscope (SEM), and used as an essential instrument for assessment and processing of thin-film or material, in the field of nanotechnology research. 진공 및 상압에서 시료의 온도를 저온에서 고온까지 변화시키며 나노미터 스케일에서 시료 표면 및 물질 특성을 관찰하기 위한 장비임. |
