| 시설장비 설명 |
- This machine is used in the bonding of two thin specimens with plasma treatment and precise alignment. - Main target specimens are thin flexible polymer sheets such as PDMS. - These thin polymer sheets may be bonded into rigid specimen such as glass, silicon. - The bonding specimens can have various size and geometry ranging from a few milimeters to 4". - Moving stage and optical tool of high amplification ensures the high precision alignment of two specimens. - Plasma treatment using high power RF generator helps the increase of bonding strength. |
