| 시설장비 설명 |
가. 사양 1. Polepiece :HR 2. Resolution -Point : 0.23 nm -Lattice : 0.1 nm -STEM : 0.2 nm 3. Acceleration Voltage : 200 keV 4. Electron Gun -Emitter : ZrO/W(100) Schottky -Brightness :≥4 x 108 A/cm2·sr 5. Spot Size -TEM : 2-5 nm -EDS/NBD/CBD : 0.5-2.4 nm 6. Magnification -TEM : x 50 - x 1,500,000 -STEM : x 100 - x 50,000,000 7. Camera Length : 80 - 2,000 mm 8. Specmen Tilting(x/y) : ±35 o/±30 o 나. 부대장비 -EDX : Oxford INCA -CCD camera : Gatan SC 1000 -Specimen holder : single tilting, double tilting, straining, heating 각 1 set |
