| 시설장비 설명 |
PW compressor (vacuum chamber)의 진공을 발생/유지하는데 사용되는 터보 펌프로 특징은 아래 개발사 소개글과 같다. [http://www.adixen.com/press-releases/vacuum-pumps-adixen-ath-2300m-a-very-high-flow-maglev-turbopump-in-a-very-small-package-sizevacuum433ppp.html] Alcatel Vacuum Technology extends its product range by introducing ATH 2300M a very high flow maglev turbopump designed for semiconductor etch processes. The ATH 2300M features 2 000 liters per second performance in a very compact package size. Adixen ATH 2300M is capable of pumping up to 2 000 sccm of argon in order to meet the highest requirements for the 012 micron geometry etching processes. Adixen’s particle reduction technology is featured in the ATH 2300M ATH 1600M ATH 1300M and ATH 400M. These extremely reliable pumps offer high troughput high pressure corrosive gas pumping and are quickly becoming the turbopump of choice in fabs throughout the world. Additionally these pumps feature state of the art technologies which include : - 5 active axes ; the most reliable and proven magnetic bearing technology. - Automatic balancing system for any rotor imbalance compensation. - Integrated heating system up to 75°c to eliminate the condensation of by-products. - Inert gas purge to prevent particle build up. The Adixen Maglev Turbopumps are maintenance free battery free dedicated to metal dielectric or poly etch ion implantation sputtering and plasma deposition. |
