| 시설장비 설명 |
1 Introduction Robotic systems are widely used for automatic material handling in semiconductor and gene-chip microarray fabrication to minimize any possibility of contamination. A typical manufacturing work cell for this type of industrial environment is shown in Figure 1. A robot sequentially removes a workpiece from a cassette and puts it into a fabrication station where the fabrication process takes place. After each fabrication step the workpiece is put back into the cassette by the robot. Upon completing one process step for all workpieces the fabrication process moves to the next step. The above process repeats multiple times for all workpieces. Features of the robotic system are: Planar workpiece. Usually the workpiece is rectangular for gene-chip microarray fabrication or round for semiconductor manufacturing. Bottom surface contact to avoid top surface damage or cross-contamination. Vacuum force using differential air pressure in the end-effectors is usually considered as the primary m |
