알파단계 아이큐
기관명 | ZEUS |
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장비번호 | |
제작사 | Kla-tencor |
모델명 | Alpha-Step IQ |
장비사양 | |
취득일자 | 2006-05-08 |
취득금액 |
보유기관명 | 한국표준과학연구원 |
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보유기관코드 | |
활용범위 | |
활용상태 | |
표준코드 | F202 |
표준분류명 | 계측 |
시설장비 설명 | The Alpha-Step IQ stylus-based surface profiler combines high measurement precision with versatility and economy. Ideal for semiconductor pilot lines and materials research this advanced surface profiler enables faster process learning and higher yields. With guaranteed 8?? (1 sigma) or 0.1% step height repeatability and sub-angstrom resolution the Alpha-Step IQ surface profiler provides excellent repeatability and performance to analyze and monitor processes. Provides advanced and customizable 2D surface analysis capabilities Enables easy location of measurement features via saved site image with recipe. Features excellent repeatability and reproducibility. Precisely determines and analyzes thin step heights surface microroughness and overall form error on thin film coatings. Provides sufficient vertical range for large topography variations. Includes multiple language support for users with a worldwide presence. Enables faster analysis routines by applying saved sets of analysis instructions. Comprehensive |
장비이미지코드 | http://www.zeus.go.kr/storage/images//equip/photo/201107/20110714151658.jpg |
장비위치주소 | 한국표준과학연구원 신소재동 |
NFEC 등록번호 | NFEC-2007-07-002124 |
예약방법 | |
카타로그 URL | |
메뉴얼 URL | |
원문 URL | http://www.zeus.go.kr/resv/equip/read/Z-NTIS-0016107 |
첨부파일 |
과학기술표준분류 | |
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ICT 기술분류 | |
주제어 (키워드) |