| 시설장비 설명 |
The Alpha- Step IQ is a state-of-the-art stylus-based surface profiler that combines high measurement precision with versatiity and economy. Ideal for applications such as pilot lines and materials research this advanced profiler enables faster process learing and higher yields. With guaranteed 7.5 (1s) or 0.1% step height repeatability and sub-angstrom resolution the Alpha-Step IQ provides excellent repeatability and performance to analyze and monitor processes. This system offers the most complete suite of two-dimensional analysis features for surface topography analysis on a variety of surfaces including wafers MEMS ceramics SIMS craters microlenses and displays. With many options available the Alpha-Step IQ provides flexibility for high vertical ranges powerful optics for sample positioning an integrated report generator and multiple language support. The system is controlled by a fast and powerful computing platform offering networking and USB communications. |
