| 시설장비 설명 |
(1) Reactor - Quartz 210mm diameter 62mm height - Viewing port on front panel (2) Parallel-plate electrodes - Upper electrode : Aluminum 140mm diameter shower head - Lower electrode : Aluminum 120mm diameter liquid cooled (3) RF Power - 13.56MHz O-200W solid state generator - Digital readout of forward and reflected power (4) Vacuum System - Chemical serieds 2-stage rotary pump 290liters/min with flowmeter for nitrogen purged gas ballast (5) Pressure measurement - Pirani-gauge 10-3 to 10Torr (6) Gas Inlet Lines - Two rotameter for CF4 and oxygen 5~50SCCM (other gas calibrations available upon request) - One nitrogen purge line (7) Process Timer - Digital (0.1-second resolution) (8) Audio Alarm - Alert operator when process is finished (9) Operation - Sequence controller for automatic operation of vacuum system gas valves and RF power (10) Safety features -Door interlock ensures system is inoperable when reactor door is open - Reset switch for immediate process halt evacuation of process gases and chamber vent (11) Utilities Requirements - Power : 115VAC 60Hz 3KVA - Cooling water : 2~3kg/cm2 1~2liters/min - Process gases : 1kg/cm2 - Nitrogen : 1kg/cm2 10liters/min - Venting : Exhaust duct for rotary pump NW25 (12) Dimensions [W×D×H mm] - 400×440×325 (13) Local supply - Automatic Pressure Control Unit |
