| 시설장비 설명 |
1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution. 2. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements. 3. Thermal limitations of positioning stage with respect to performance may limit continuous force output. 4. Force may be limited by amplifier output. 5. Values with Aerotech controls and HALAR option. 6. Dependent on flatness of stage mounting surface. 7. To protect air bearing against under-pressure an in-line pressure switch tied to the motion controller/amplifier E-stop input is recommended. 8. Air supply must be clean dry to 0° F dewpoint and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity. 9. Maximum upper axis length is 200 mm when mounting the ABL1500 in an XY configuration |
