| 시설장비 설명 |
특징 Laser micro-machning workstation 레이저 가공에 최적화된 워크스테이션. 구성및성능 - XY Travel: 300mm x 300mm - Z Travel: 100mm - XY Position Accuracy: +/- 0.2um / full travel - XY Repeatability: +/-1um / full travel - Maximum Velocity: 200mm/sec Resolution: 5 nanometer/count - Velocity Ripple: +/-0.2% (@100mm/sec) - M plan QPO NIR 10X objective lens - Field of view: 200um - Vision resolution: 1um - XY Travel: 300mm x 300mm - Z Travel: 100mm - XY Position Accuracy: +/- 0.2um / full travel - XY Repeatability: +/-1um / full travel |
