| 시설장비 설명 |
1. To get the high resolution image under low accelerating voltage and easy maintenance field emission source should be equipped. 2. Eucentric specimen chamber should be provided for the focus and magnification remain unchanged when the specimen is moved. 3. Airlock pre-evacuation chamber system should be incorporated in the system for preventing the contamination and quick operation. 4. To effective maintaining high clean vacuum system it should be equipped magnetic floating type Turbo Molecular Pump and anti-contaminat ion trap which using for maintenance cost-free. 5. This instrument should have Deceleration mode which decelerates incidents electrons just before they hit a specimen. 6. This SEM should be possible to save various conditions of the electron optics in multi-user by assigning the condition number to them and reset the same conditions by designating the corresponding number. 7. This SEM should be standard-equipped with the function for mixing the detection signals of the upper and lower secondary electron detector s provided each SE, BSE mixing data. |
