| 시설장비 설명 |
기체점성원리에 의한 진공측정기 Spinning Rotor Gauge (SRG) has been used to transfer standard gauge for international comparison at the high vacuum standards. We calibrated a spinning rotor gauge by using dynamic calibration system (DCS) that was a national high vacuum standards system. And its uncertainties were evaluated with the International Organization for Standardization (ISO) they were recognized ai A type uncertainty B type uncertainty combined Standard uncertainty and expanded uncertainty. The combined standard uncertainties were $1.8007\times10^{-5}$ Pa ~ ~$4.8422\times10^{-5}$ Pa for this spinning rotor gauge. |
