| 시설장비 설명 |
1) Desktop Scanning Electron Microscope 1) Resolution : 5nm (30kV, SE Image) 2) Magnification : 30x ~ 100,000x (유효배율 60,000x) 3) Accelerating Voltage : 5 ~ 30kV (5/10/15/20/30 - 5step) 4) Detector : 2차전자영상(SEI) - Secondary Electron Image 5) Observation mode : Standard Mode 6) Electron Gun : 텅스텐 필라멘트, 카트리지 교환 방식 : 바이어스 시스템 - 자동 바이어스 방식 : 건 얼라인먼트 - 수동방식 7) Lens system : Two-stage Elecromagnetic : Condenser Lens One-stage Elecromagnetic : Objective Lens 8) Detector type : E-T Detector(SEI) 9) Stage Traverse : 5-axis System - X, Y-axis : 40mm / R-axis : 360° - Z : 0~35mm / Tilt-axis : 0~45° 10) Image Shift : X, Y Image Shift (±150㎛) 11) Specimen size : 80mm(Diameter) / 35mm(Height) 12) Frame memory : High Speed Mode (320*240) : 실시간 Preview mode Low Speed Mode (640*480) Photo Mode1 (1280*960) Photo Mode2 (2560*1920) Sampling Photo Mode3 13) Spot mode : Position Selectable 14) Automation Funtion : Auto Start, Auto Focus, Auto Stigmator, Auto Contrast&Brightnes |
