| 시설장비 설명 |
주요 기능 - Class leading x-ray geometry - Class leading secondary electron imaging in variable pressure - High brightness LaB6 source option - Clean pumping technology with fast pumpdown - High repeatability stage with large stage movements - Variable pressure operation - Large stage movements - Fast pump down - Future Assured upgrades to water vapour enhanced imaging - High brightness LaB6 source option - Remote Diagnostics over the internet - Larger stage movements - Navigation by images from other digital sources - Improved low kV imaging - Improved LaB6 imaging for x-ray analysis |
