| 시설장비 설명 |
1. The system is a versatile high-resolution FIB/SEM for 2D and 3D material characterization and analysis. 2. The system combines innovative electron and ion optics combined with state of the art patterning control which will expand the characterization and analytical capabilities by providing better and faster ways for material characterization, analysis and sample preparation. 3. The key enabling technologies are all integrated onto a single platform and comprise: a. Novel Field Emission Electron Optics for high current and high resolution imaging. b. High-resolution ion optics with fast high-volume milling c. High precision specimen goniometer d. System architecture is optimized for automation 4. The system must be available for automatically 3D EDS and cryo sample preparation system. 5. The system must be a high resolution scanning electron microscope able to observe specimens in their natural state in gaseous environment at pressures up to 3000Pa. Gaseous Secondary Electron Detector should give high efficiency in a wide range of chamber gases, including water vapor supplied from a built- in reservoir for observation of wet, dirty, out gassing samples with minimized charging |
