| 시설장비 설명 |
Confocal sputter system 고순도금속물질의스퍼터증착 The Kurt J. Lesker Company CMS-18 is a standard system platform comprised of the following major sub-assemblies. A large variety of options are available with the CMS-18. Please note that depending on system configuration, all of the options listed may not be compatible with one another. The system is delivered to the customer fully assembled and performance tested. Process Chamber 304 SS 18” diameter by 15” height O-ring sealed top plate Welded, domed chamber bottom 8” OD CF viewport and shutter Appropriate cf pumping, gauging and instrumentation ports Up to six cf source ports Load lock or transfer vessel attachment port Spare, blanked CF ports for expansion Prior to shipment, the complete operating system is fully vacuum leak checked with a helium mass spectrometer. The base pressure specification for the system is 5 x 10-8 Torr or lower for a properly conditioned chamber VACUUM PUMPING CTI CryoTorr 8 cyrogenic pump with silicon diode sensor CTI Model 8200 compressor. The cryo compressor is located remotely from system frame. 20 foot helium lines are standard. 3-position, pneumatically actuated isolation gate valve Regeneration purge and pneumatic regeneration valve Oil-sealed mechanical pump for roughing and cryo regeneration Foreline trap, mist eliminator, roughing valve, and all roughing hardware Independent, pneumatically actuated vent |
