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장비 및 시설 기본정보
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장비 개요
| 기관명 | ZEUS |
|---|---|
| 장비번호 | |
| 제작사 | 엠에스테크 |
| 모델명 | Model 8000 |
| 장비사양 | |
| 취득일자 | 2010-10-04 |
| 취득금액 |
보유기관 및 이용정보
| 보유기관명 | 대구경북과학기술원 |
|---|---|
| 보유기관코드 | |
| 활용범위 | |
| 활용상태 | |
| 표준코드 | C514 |
| 표준분류명 | |
| 시설장비 설명 | 1. Analyzer Triaxial I-V C-V Measurement Probing System_PCB Rabozack type Low Noise Leakage Current ( ~ 1 fA less than) A. Probe station Main body unit_MST8000CHC a. 8 inch vacuum chuck - Low noise Vacuum Chuck - From 3 to 8 inch - On/broken wafer vacuum - Chuck theta 15c fine control unit : micrometer 150-191 - Chuck round guide : steel b. Z Stage Unit - stage plate up/down fine control 20mm - Al 5051 "U" platen 6 positioner up type - Micrometer fine control handle lift type - Microscope Up/down lift c. 8"x8" X-Y Stage Unit - X-Y fine speed motion knob control unit and system large type - LM Lead screw 2line - Boll screw sub - Coupling mount type - Motion control buffer unit - Resolution : Less than 5um - Travel : 200mm ( avail 8" expansion) d. 2"x2" X-Y micrometer Translation manual type e. Other units - 8 positioner's vacuum switch : Left right 2. Microscope (Maximum : 500 X)_CCD Zoom Camera A. High Resolution Microscope_500x a. Zoom Lense : 1 ~ 2x b. Object Lense : 5x c. Total Magnification : 500x (Max) d. Fiber Illuminator Volume Control e. CCD Camera C-mpunt CCD Camera Velacam_5520 9.2 LCD Monitor Model : PB 100 & Holdder_C Positioner body - HIGH RESOLUTION : 1um 3. A. High Positioner : ~ 1 fA Holder Less than - Manipulator high resolution type - LM cross roller type - X/Y/Z fine micrometer control knob - Submicron geometric vacuum base type - Resolution : 1um - Travel : 15mm - Vacuum on/off switch 4. Probe Holder_C Type A. Triaxial cable 2 M - Cable 2M Jack type - Low noise holder ( ~ 1fA level ) - Vacuum/hot/cool/Holder 5. Probe tip -Vacuum/hot/cool/MST_0.5um x 25mm Tip 6. Vacuum pump - Applied a exclusive laboratory - 3L/Hg (for laboratory / low noise) 7. Dark Shield Box_Dual Shielding A. Dark Shield Box _Dual Door - Dimension : 1000 x 900 x 780 - TRX Plate Pannel - TRX 4's BNC 4's 8. Vibration Table_Air Compressor - Dimension : 900 x 900 x 800 - Air Compressor 6" |
| 장비이미지코드 | http://nfec.ntis.go.kr/storage/images/equip/photo/201101/.thumb/20110128162203.jpg |
| 장비위치주소 | 대구 달성군 현풍면 상리 50-1 대구경북과학기술원 2연구동 4층 411 |
| NFEC 등록번호 | NFEC-2011-01-138832 |
| 예약방법 | |
| 카타로그 URL | |
| 메뉴얼 URL | |
| 원문 URL | http://www.zeus.go.kr/equip/read?equipId=Z-NTIS-0025346 |
| 첨부파일 |
추가정보
| 과학기술표준분류 | |
|---|---|
| ICT 기술분류 | |
| 주제어 (키워드) |