| 시설장비 설명 |
1. Introduction
The SUNWAVE Microscopic Laser Doppler vibrometer can be used to the dynamic characteristics measurements of micro parts. The Laser Doppler Interferometer is integrated into a microscope system. This system is particularly suitable to analyze the vibrations and nano-scale displacement of the MEMS system. A 2-axis motorized stage is optional to perform scanning measurement for the mode shape analysis. 2. Laser Source He-Ne Laser Output power: 1.0 mW Wavelength: 632.8nm 3. Objective Lens: 10x, 50x 10x objective lens: WD = 33mm, NA= 0.28, focal length= 20mm, DOF= 3.5 ？gm 50x objective lens: WD = 13mm, NA= 0.55, focal length= 4mm, DOF= 0.9 ？gm 4. System controller Main controller unit: DPU system (Digital processing unit) Pentium PC Operate software: windows 2000 5. Spot Diameter 10x : 10？gm 50x : 5 ？gm 6. 3-axis motorized stage for scanning (including motion card) Scanning area : 10 mm x 10 mm Minimum incremental : Less 0.05 ？gm Includes automatic control software for scanning 7. |
