| 보유기관명 |
한국생산기술연구원 |
| 보유기관코드 |
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| 활용범위 |
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| 활용상태 |
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| 표준코드 |
C208 |
| 표준분류명 |
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| 시설장비 설명 |
1. Low Pressure Vacuum Chamber Unit 2. 13.56 MHz automatic matching generator 3. Corrosive gas version 4. Heatable chamber Monomer for liquid 5. Rectangular SUS Hinged Safety valve H2 operation 6. Thickness layer : some nm - 10 m 7. Hardness : between 1 and 90GPa 8. Density : 1.8-2.8g/cm3 9. Band Gap : 0.8-3eV 10. PC-Control with Data measuring 11. Etching Coating of surface by plasma system 12. Dimensions 310 - 560 mm x D 420 - 600 mm x H 570-860mm 13. Power 230 V / 16 A 14. Pfeiffer DUO 5 MC - 5 m³/h vacuum pump 15. Heated up to 80 °C 16. Analysis (SEMTEM) Archaeology Automotive industry Elastomer industry Medical technology Plastics industry Research and development Semiconductor industry Small scale manufacturing Sensor technology Sterilization Textile reatment. |
| 장비이미지코드 |
http://www.zeus.go.kr/storage/images//equip/photo/201306/2013061810465957.JPG |
| 장비위치주소 |
한국생산기술연구원 금형기술센터 부천테크노파크 쌍용3차 301동 |
| NFEC 등록번호 |
NFEC-2013-10-183283 |
| 예약방법 |
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| 카타로그 URL |
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| 메뉴얼 URL |
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| 원문 URL |
http://www.zeus.go.kr/resv/equip/read/Z-kitech-00336 |
| 첨부파일 |
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