시설장비 설명 |
The system is FEG Scanning Transmission Electron Microscope which is designed to deliver the ultimate in performance in all TEM, STEM modes. The acceleration voltage is adjustable from 30 kV. - Symmetric twin objective lens with large pole piece gap allows sub-Ångström performance. The system has Double Cs Ccorrector(TEM/STEM) which is a multi-pole corrector system. - Next-generation spherical aberration correction technology has been added to the system, utilizing ultra-high resolution imaging technology. It can observe images in various fields such as secondary battery, semiconductor, ceramics, energy, environment as well as materials, and it is possible to analyze crystal structure and qualitative and quantitative analysis (EDS, EELS) of materials. |