| 시설장비 설명 |
특징 Scanning Electron Microscope. 구성및성능 - Resolution: 3.5nm (30KV SE Image) - Magnification: x30 ~ x300000 - Image: Secondary electron image(SEI) - Accelerating voltage: 0.5KV ~ 30KV - Electron gun: @(Tungsten) - Objective: 4th portable aperture - Image shift: +/-20um (WD: 5mm) - Stage (5-axis) - Specimen Size(Max): 160mm - Scanning Mode: Photo screen capture mode II(2560 x 1920 pixel) - Image format: JPG TIFF BMP - Image Display: 19" LCD Monitor - Automation - Working Distance: 5 ~ 50mm - Vacuum System: Fully Automation (Vacuum timing: in 5 mitute) |
