| 시설장비 설명 |
특징 -Resolution (secondary electron image) :5.5 nm(at 25 kV, WD : 10 mm) -Acceleration voltage : 1 - 25 kV (7 steps) -Magnification:15 TO 200,000 (25 steps) -Image modes : SEI(secondary electron image), BEI(backscattered electron image) -Lens system : Condenser lens(two stage), Objective lens(single stage) -Focusing : manual and auto control -Astigmatism correction : manual and auto control -Image fine shift:Joystick built-in ±10 ㎛ in all direction -Specimen stage : eucentric goniometer -Specimen size : 10 mm dia. x 10 mmh, 32 mm dia. x 10 mmh, 51 mm dia. s 10 mmh -Specimen movement : X=10 mm, Y=20 mm, T= -40 to 90 o, R=360 o -Working distance : 10, 20, 48 mm |
