| 시설장비 설명 |
프라이드용 Dry gas scrubber Model : 200D type : 1S scrubber + 2Canister Target Gas : C12 Asorbent : Zebent-C1 Canister Volume : 200Liter x 2BT Safety Interlock : Temperature, pressure Efficency of gas removal : Over 99% Gas In/Outlet : NW40 Dimension : 1450Wx800Dx1600H Power : 220V Maker : KOCAT INc Introduction of dry scrubber-Applicable to removal of various gases such as corrosive gas, harmful gas, explosive gas and halogan gas at semiconductor Fab by adsorption. Characteristics of dry scrubber - Reduce maintenance fees by supplying adsorbent simultaneously. - Adopt automatic system by installing Touch Screen - Prompt changes against operation mistakes by using PLC program - Safe operation by installing thermocouple inside of canister. - Efficient pressure management (inlet pressure warning) - Compact design - Maximize gas disposal efficiency (safe and effective capacity of adsorbents) - Install by-pass canister : Can handle poisonous gas in case of emergency |
