| 시설장비 설명 |
The VersaProbe is a multi-technique XPS instrument based on PHI’s highly successful and patented scanning XPS microprobe technology. The VersaProbe provides: x-ray beam induced secondary electron imaging for rapid and confident location of small sample features, unique micro-area spectroscopy performance, chemical state XPS imaging, high performance macro-area spectroscopy, high performance sputter depth profiling, automated angle dependent depth profiling, turnkey insulator analysis, and an instrument platform that accommodates alternative x-ray sources, ion guns, electron guns, and sample treatment chambers. |
