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원자간력현미경

보유기관명, 보유기관코드, 활용범위, 활용상태, 표준코드, 표준분류명, 시설장비 설명, 장비이미지코드, 장비위치주소, NFEC 등록번호, 예약방법, 카타로그 URL, 메뉴얼 URL, 원문 URL, 첨부파일 순으로 구성된 표입니다.
보유기관명	한국생산기술연구원
보유기관코드
활용범위
활용상태
표준코드	A208
표준분류명	기타
시설장비 설명	Flexure guided XY scanner is used to maintain zero background curvature - Symmetric single module flexure 2D scanner structure - Out-of-plane motion: less than 1 nm over 40 μm scan range XY scan range: 50 μm × 50 μm (closed-loop) - 20 bit XY position control and 24 bit XY position sensor 2. Standard NX AFM Head Includes a high force Z scanner - Flexure guided structure driven by multiply stacked piezoelectric stacks - Z scan range: 15 μm - Primary resonant frequency: > 9 kHz Includes a probe hand to which a cantilever is attached - Mechanical oscillation frequency: Up to 3 MHz - Voltage bias range to the cantilever: -10 V to 10 V Detects the deflection of the cantilever using SLD (Super Luminescent Diode) fortopography feedback - SLD wavelength: 830 nm - SLD has low coherence length eliminating optical interference - SLD coherent length: ~50 μm Dovetail-lock head mount for easy mount/removal of the AFM head - Automatically connects to the electronics upon the mount Includes the IR detection kit to locate the
장비이미지코드	http://www.zeus.go.kr/storage/images//equip/photo/201405/2014051515287556.JPG
장비위치주소	패키징기술센터
NFEC 등록번호	NFEC-2014-05-188246
예약방법
카타로그 URL
메뉴얼 URL
원문 URL	http://www.zeus.go.kr/resv/equip/read/Z-kitech-00245
첨부파일

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