시설장비 설명 |
General Information The Hitachi S-4800 is a truly versatile platform comprising impressive high resolution performance advanced detection technology and a user interface that makes it possible to capture even the most short lived moments accurately and clearly. It employs a semi-in-lens design for large sample accommodation while achieving ultra-high resolution comparable to performance only available with in-lens UHR SEM 5-1. Detail specification S-4800 FE-SEM System Specification Specimen : Solid state samples 구성및성능 1.가속전압 - Deceleration OFF : 0.5 ~30kv - Deceleration on : 0.1 ~2.0kv 2. qnsgosmd : 1.0nm(15kv)/1.4nm(1kv) |