| 시설장비 설명 |
- The system is a fully digital, Extreme High Resolution (XHR) Field Emission Scanning Electron Microscope (FE SEM) equipped with focused ion beam (FIB) technology. FE SEM has High-performance electron column with UC monochromator technology for nanometer SEM image resolution and surface sensitivity. - The system is equipped with a 5-axes motorized x-y-z-rotate-tilt eucentric stage, of which x, y and rotation movements are piezo controlled. - The system is equipped with automation software for automated serial sectioning and imaging through a user-defined volume of a specimen. The sequence of images captured by the software can be complied into a video or can be used 3D reconstruction of the sliced volume. - Electron Beam Deceleration for improved low-kV performance, access to ultra-low landing energies (down to 20 V), charge compensation and the balanced topographic and material contrasts. - An integrated plasma cleaner(standard) to ensure a clean specimen surface. A clean specimen surface is especially of importance when working at low landing energies, where the deposition rate of hydro carbon is highest and true sample information desired. - The system is equipped with a tool for in-situ sample manipulaton and TEM lamella transfer. |
