시설장비 설명 |
1. Observation Possible at High Resolution in wide Accelerating Voltage - This equipment should be designed low- aberration objective lens which is guaranteed high resolution particularly at medium / low accelerating voltages. - An excellent performance should be guaranteed at practical accelerating voltages which are frequently used for SEM observation EDX analysis etc. 2. Operating Condition Memory for multi user This SEM should be possible to save various conditions of the electron optics in use by assigning the condition number to them and reset the same conditions by designating the corresponding number. 3. Comfortable SEM Operation under GUI (Graphical User Interface ) Environment - All operating software should be MS Windows NT™ or better 4. Signal Mixing of Upper and Lower Secondary Electron Detectors - This SEM should be standard-equipped with the function for mixing the detection signals of the secondary electron detectors provided at the top and bottom of the objective lens. 5. Design Oriented to t |